Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
1987
Résumé
The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied with a cw Ar ion laser at 458 and 514 nm. The height, the width, as well as the elec. cond. of the deposited stripes are reported as a function of the vapor pressure of the metalorg. precursor, the laser intensity, and the writing speed.
Détails
Titre
Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
Auteur(s)
Braichotte, D. ; Van den Bergh, H.
Publié dans
Applied Physics A
Volume
44
Numéro
4
Pages
353-359
Date
1987
Mots-clés (libres)
Note
Copyright 2003 ACS
CAPLUS
AN 1988:141344
CAN 108:141344
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
CAPLUS
AN 1988:141344
CAN 108:141344
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
Laboratoires
LPAS
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Production scientifique et compétences > ENAC - Faculté de l'environnement naturel, architectural et construit > ENAC Archives > LPAS - Laboratoire de pollution atmosphérique et du sol
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Date de création de la notice
2011-02-01