Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum

The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied with a cw Ar ion laser at 458 and 514 nm. The height, the width, as well as the elec. cond. of the deposited stripes are reported as a function of the vapor pressure of the metalorg. precursor, the laser intensity, and the writing speed.


Published in:
Applied Physics A, 44, 4, 353-359
Year:
1987
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1988:141344
CAN 108:141344
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
Laboratories:




 Record created 2011-02-01, last modified 2018-01-28


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