Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied with a cw Ar ion laser at 458 and 514 nm. The height, the width, as well as the elec. cond. of the deposited stripes are reported as a function of the vapor pressure of the metalorg. precursor, the laser intensity, and the writing speed.
Copyright 2003 ACS
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
Record created on 2011-02-01, modified on 2016-08-09