Laser induced chemical vapor deposition of metals for electrical contacts in semiconductor processing
Braichotte, D.; Van den Bergh, H.
1985

Abstract

Pyrolytic and photolytic laser chem. vapor deposition of Cu, Pt, Ga, and Sn was studied for the prodn. of low-resistance ohmic contacts of very small dimensions.

Details

Title Laser induced chemical vapor deposition of metals for electrical contacts in semiconductor processing
Author(s) Braichotte, D. ; Van den Bergh, H.
Published in Integrated Optics
Volume 48
Pages 38-43
Date 1985
ISBN 9783662135716
Keywords
Note Copyright 2003 ACS
CAPLUS
AN 1985:497072
CAN 103:97072
76-2
Electric Phenomena
Inst. Chim. Phys.,Ec. Polytech. Fed. (ETH),Lausanne,Switz. FIELD URL:
Journal
SSOSDB
written in English.
Metals Role: DEV (Device component use), PEP (Physical, engineering or chemical process), TEM (Technical or engineered material use), PROC (Process), USES (Uses) (chem. vapor deposition of, laser-induced, for elec. contacts in semiconductor devices); Semiconductor devices (laser-induced chem. vapor deposition of elec. contacts for); Electric contacts (laser-induced chem. vapor deposition of, for semiconductor devices)
DOI https://doi.org/10.1007/978-3-540-39452-5_10
Laboratories LPAS
Record Appears in Scientific production and competences > ENAC - School of Architecture, Civil and Environmental Engineering > ENAC Archives > LPAS - Air and Soil Pollution Laboratory
Peer-reviewed publications
Work produced at EPFL
Book chapters
Published
Record creation date 2011-02-01