A SHADOW MASK-EVAPORATED TOPSIDE PYROMEMS IGNITER

A shadow mask-evaporated pyroMEMS igniter is presented. The metallization was successfully carried out without ignition or any visible degradation of the propellant charge during evaporation. Directly depositing the Joule-heating igniter onto the propellant charge led to a high level of ignition delay time homogeneity (< 1 ms st. dev.) as well as smooth combustion behavior. Effect of different deposition thicknesses (500 nm vs. 2000 nm), deposition methods (e-beam vs. thermal) and substrate holders (rotary-planetary vs. line-of-sight) on ignition behavior were investigated. Two different ignition regimes were observed depending on input power and igniter thickness: Joule-heating and spark-induced ignition. Highest fabrication repeatability (in terms of electrical resistance) and ignition reliability (in terms of ignition delay time) were obtained with the 2000 nm thick igniters.


Published in:
Proceedings of PowerMEMS, 1, 43-46
Presented at:
PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010
Year:
2010
Keywords:
Laboratories:




 Record created 2011-01-24, last modified 2018-01-28


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