Two-wavelength grating interferometry for extended range MEMS metrology

Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.


Presented at:
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, TAIWAN, Aug 12-16, 2007
Year:
2007
Keywords:
Laboratories:




 Record created 2011-01-21, last modified 2018-03-17


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