Conference paper

Thermal-mechanical detector array with integrated diffraction grating

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.


    • EPFL-CONF-162481

    Record created on 2011-01-21, modified on 2017-05-10


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