Thermal-mechanical detector array with integrated diffraction grating

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.


Published in:
2007 Ieee Leos Annual Meeting Conference Proceedings, Vols 1 And 2, 836-837
Presented at:
20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society, Lake Buena Vista, FL, Oct 21-25, 2007
Year:
2007
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
Laboratories:




 Record created 2011-01-21, last modified 2018-09-13


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