Thermal-mechanical detector array with integrated diffraction grating
Ferhanoglu, O.; Toy, M. F.; Unal, G.; Kalyoncu, H.; Kabuli, G.; Caliskan, A. U.; Urey, H.
2007

Abstract

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.

Details

Title Thermal-mechanical detector array with integrated diffraction grating
Author(s) Ferhanoglu, O. ; Toy, M. F. ; Unal, G. ; Kalyoncu, H. ; Kabuli, G. ; Caliskan, A. U. ; Urey, H.
Published in 2007 Ieee Leos Annual Meeting Conference Proceedings
Pages 836-837
Conference 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society, Lake Buena Vista, FL, Oct 21-25, 2007
Date 2007
Publisher Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
DOI https://doi.org/10.1109/LEOS.2007.4382668
Laboratories IMT
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > IMT - Institute of Microengineering
Conference Papers
Work produced at EPFL
Published
Record creation date 2011-01-21

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