000162480 001__ 162480
000162480 005__ 20180913060357.0
000162480 0247_ $$2doi$$a10.1109/LPT.2007.908450
000162480 022__ $$a1041-1135
000162480 037__ $$aARTICLE
000162480 245__ $$aTwo-wavelength grating interferometry for MEMS sensors
000162480 260__ $$bInstitute of Electrical and Electronics Engineers$$c2007
000162480 269__ $$a2007
000162480 336__ $$aJournal Articles
000162480 520__ $$aDiffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
000162480 6531_ $$agrating interferometry
000162480 6531_ $$amicro-electro-mechanical-systems (MEMS)
000162480 6531_ $$aoptical sensing
000162480 6531_ $$atwo-wavelength interferometry
000162480 6531_ $$aPhase-Shifting Interferometry
000162480 6531_ $$aReadout
000162480 700__ $$aFerhanoglu, Onur
000162480 700__ $$0242054$$aToy, M. Fatih$$g183937
000162480 700__ $$aUrey, Hakan
000162480 773__ $$j19$$q1895-1897$$tIeee Photonics Technology Letters
000162480 909C0 $$0252447$$pIMT$$xU10343
000162480 909CO $$ooai:infoscience.tind.io:162480$$pSTI$$particle
000162480 917Z8 $$x183937
000162480 917Z8 $$x148230
000162480 937__ $$aEPFL-ARTICLE-162480
000162480 973__ $$aEPFL$$rNON-REVIEWED$$sPUBLISHED
000162480 980__ $$aARTICLE