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Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope

Kim, Myun Sik ; Scharf, Toralf ; Herzig, Hans Peter

Presented at:
8th Fraunhofer IISB Lithography Simulation Workshop, Hersbruck, Germany, September 23-25, 2010
Year:
2010
Laboratories:
OPT

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
Presentations & Talks
Work produced at EPFL
Published



 Record created 2010-12-13, last modified 2018-09-25


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