Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
2010
Details
Title
Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
Author(s)
Kim, Myun Sik ; Scharf, Toralf ; Herzig, Hans Peter
Conference
8th Fraunhofer IISB Lithography Simulation Workshop, Hersbruck, Germany, September 23-25, 2010
Date
2010
Laboratories
OPT