Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
Kim, Myun Sik; Scharf, Toralf; Herzig, Hans Peter
2010

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Title Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
Author(s) Kim, Myun Sik ; Scharf, Toralf ; Herzig, Hans Peter
Conference 8th Fraunhofer IISB Lithography Simulation Workshop, Hersbruck, Germany, September 23-25, 2010
Date 2010
Laboratories OPT
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
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