Home > Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
 

Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope

Kim, Myun Sik ; Scharf, Toralf ; Herzig, Hans Peter

Presented at:
8th Fraunhofer IISB Lithography Simulation Workshop, Hersbruck, Germany, September 23-25, 2010
Year:
2010
Laboratories:
OPT

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
Presentations & Talks
Work produced at EPFL
Published



 Record created 2010-12-13, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
4
5
 
(Not yet reviewed)