Infoscience

Presentation / Talk

Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope

Kim, Myun Sik; Scharf, Toralf; Herzig, Hans Peter
  • Presented at: 8th Fraunhofer IISB Lithography Simulation Workshop, Hersbruck, Germany, September 23-25, 2010
  • Publication date: 2010

    Reference

    • EPFL-TALK-161617

    Record created on 2010-12-13, modified on 2017-05-10

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