Ultra-low pressure sensor for neonatal resuscitator

A Venturi-type flow sensor has been designed and fabricated for neonatal respiratory assistance to control airway pressure and tidal volume. As the low flow range and sensing principle require the measurement of correspondingly very low pressures, a very responsive sensor, based on a polymer membrane acting onto a piezoresistive cantilever force sensor based on low-temperature co-fired ceramic (LTCC), was developed. This paper details the 3D modelling, manufacture, assembly and characterisation of the sensor. Compared to expensive and fragile MEMS-based devices, this sensor, based on LTCC, thick-film technology and polymer parts, provides an accurate and robust, yet low-cost alternative. Keywords: pressure sensor; Venturi flow sensor; LTCC; thick-film technology.


Published in:
Procedia Engineering, 5, 532-535
Presented at:
Eurosensors XXIV, Linz, Austria, 5-9.9.2010
Year:
2010
Publisher:
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa
ISSN:
1877-7058
Keywords:
Laboratories:




 Record created 2010-12-12, last modified 2018-01-28

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