Abstract

Substrates with 1-dimensional nanosize grooves were prepared using extreme-ultraviolet interference lithography (EUV-IL), wherein gold nanoparticles were self-assembled to form 1-dimensional structures. To measure the electrical properties of gold nanoparticle chains we introduce a novel in-situ measuring method based on nanomanipulator system in a scanning electron microscope. This method comprises enormous versatility for the precisely electrical addressing of low-dimensional nanoscale structures and may even be applied to routinely addressing of structures in the sub-10 nm range.

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