Density-functional theory study of interstitial iron and its complexes with B and Al in dilute SiGe alloys

Density-functional theory is used to model interstitial iron and its complexes with aluminum in Si-rich SiGe alloys with Ge concentration up to 8%. Both short-range and long-range defect-Ge interactions are considered. It is found that Fe prefers Si-rich regions. The shifts of the electrical levels of Fe-acceptor pairs are calculated using the marker method. (C) 2008 Elsevier Ltd. All rights reserved.


Published in:
Materials Science In Semiconductor Processing, 11, 332-335
Presented at:
International Symposium on Beyond Silicon Technology held at the 2008 EMRS Spring Meeting, Strasbourg, FRANCE, May 26-30, 2008
Year:
2008
Keywords:
Laboratories:




 Record created 2010-11-30, last modified 2018-03-17


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