Vertical arrays of nanofluidic channels fabricated without nanolithography

Vertical arrays of sealed nanofluidic channels, in which both cross-sectional dimensions are controllable down to 10 nm, were fabricated by selective side etching of a SiGe heterostructure comprised of layers of alternating Ge fractions. Capillary filling of these nanochannel arrays with fluorescent dye solutions was investigated using a confocal microscope. The feasibility of using nanochannels for size-based separation of biomolecules was demonstrated by imaging aggregates of tagged amyloid-beta peptide. The ability to integrate a large number of nanochannels shows promise for high throughput applications involving lab-on-a-chip systems.


Published in:
Lab On A Chip, 9, 1556-1560
Year:
2009
Keywords:
Laboratories:




 Record created 2010-11-30, last modified 2018-01-28


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