Vibration Energy Harvesting with PZT Micro Device

A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped with interdigitated electrodes to achieve higher voltages. A coupling constant k(2)=5% was derived from the difference in resonance frequencies at low and high impedance. At optimal load impedance, a voltage of 1.6 V and an output power of 1.4 mu W was measured with a 0.8x1.2 mm cantilever having an active area of 0.8x0.4 mm, excited with 2g at 870 Hz.

Published in:
Proceedings Of The Eurosensors Xxiii Conference, 1, 1191-1194
Presented at:
23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa

 Record created 2010-11-30, last modified 2018-03-17

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