2D CMOS integrated magnetometer based on the miniaturized circular vertical Hall device

We present a CMOS integrated two axes magnetometer. The sensor contains a miniaturized 8-contact circular vertical Hall device as a sensing device, as well as the necessary biasing and signal conditioning electronics. A novel biasing of the device, signal retrieval and phase sensitive detection that involve all contacts were applied. This approach strongly suppresses offset and low frequency noise of the sensor in a similar way as the conventional spinning current method does. The magnetometer has sensitivity of 0.22 V/T for 0.2 mA Hall biasing current, low residual offset in the range 80-300 muT, low nonlinearity and 15 nV/radicHz input referred voltage noise.

Presented at:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, CO, USA, 21-25 06 2009

 Record created 2010-11-30, last modified 2018-01-28

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