Hybrid-Aligned Nematic Liquid-Crystal Modulators Fabricated On Vlsi Circuits
PATEL, J.S.; HARITOS, K.G.; XU, W.H.; SCHERER, A.; PSALTIS, D.; DROLET, J.J.P.
1995

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Abstract

A new method for fabricating analog Light modulators on VLSI devices is described. The process is fully compatible with devices fabricated by commercial VLSI foundries, and the assembly of the modulator structures requires a small number of simple processing steps. The modulators are capable of analog amplitude or phase modulation and can operate at video rates and at low voltages (2.2 V). The modulation mechanism and the process yielding the modulator structures are described. Experimental data are presented. (C) 1995 Optical Society of America

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Title Hybrid-Aligned Nematic Liquid-Crystal Modulators Fabricated On Vlsi Circuits
Author(s) PATEL, J.S. ; HARITOS, K.G. ; XU, W.H. ; SCHERER, A. ; PSALTIS, D. ; DROLET, J.J.P.
Published in Optics Letters
Volume 20
Pages 2222-2224
Date 1995
Keywords
DOI https://doi.org/10.1364/OL.20.002222
Other identifier(s) View record in Web of Science
Laboratories LO
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LO - Optics Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date 2010-11-25

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