A magnetically actuated MEMS scanning mirror


Published in:
Miniaturized Systems With Micro-Optics And Micromechanics, 2687, 47-52
Presented at:
Conference on Miniaturized Systems with Micro-Optics and Micromechanics, SAN JOSE, CA, Jan 30-31, 1996
Year:
1996
Publisher:
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010
Keywords:
Laboratories:




 Record created 2010-11-25, last modified 2018-03-17


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