MEMS inductors: Technology and applications

We expose the past and present state-of-the-art of Micro-ElectroMechanical System (MEMS) inductors. Starting from the basic inductor equations, we discuss the various material and frequency-dependent loss mechanisms that contribute to a decreasing quality factor of an inductive component. We then discuss the most commonly developed inductor geometries: the planar, solenoidal, and stripe inductor. Subsequently, we highlight various techniques to realize RF inductors for operation at GHz frequencies and their integration directly on silicon substrates. We also explain how cheap packaging technologies can be used to realize inductive components that interface directly with silicon chips or can be used for high-sensitivity magnetic field and current sensors. We finally discuss technologies for the realization of power inductors.

Published in:
Magnetic Nanostructures in Modern Technology: Spintronics, Magnetic MEMS and Recording, 127-152
Presented at:
Conference of the NATO Advanced Study Institute on Magnetic Nanostructures for Micro-Electromechanical Systems and Spintronic Applications, Catona, ITALY, Jul 02-15, 2006
Springer, 101 Philip Drive, Norwell, Ma 02061 Usa

 Record created 2010-11-24, last modified 2018-03-17

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