Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps
2007
Files
Details
Title
Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps
Author(s)
Ciressan, Nicoleta Diana Badila ; Hibert, Cyrille ; Mazza, Marco ; Ionescu, Adrian M.
Published in
Microsystem Technologies
Volume
13
Issue
11-12
Pages
1489-1493
Date
2007
Publisher
Springer-Verlag
ISSN
1432-1858
Note
National Licences
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Work produced at EPFL
Journal Articles
Published
Work produced at EPFL
Journal Articles
Published
Record creation date
2010-11-08