Cointegration of Gate-All-Around MOSFETs and Local Silicon-on-Insulator Optical Waveguides on Bulk Silicon
2007
Details
Title
Cointegration of Gate-All-Around MOSFETs and Local Silicon-on-Insulator Optical Waveguides on Bulk Silicon
Author(s)
Moselund, K. E. ; Bouvet, D. ; Tschuor, L. ; Pott, V. ; Dainesi, P. ; Eggimann, C. ; Le Thomas, N. ; Houdre, R. ; Ionescu, A. M.
Published in
IEEE Transactions On Nanotechnology
Volume
6
Issue
1
Pages
118-125
Date
2007
Publisher
Institute of Electrical and Electronics Engineers
ISSN
1536-125X
Other identifier(s)
View record in Web of Science
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > SCI-SB-RH - Groupe SCI SB RH
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > SCI-SB-RH - Groupe SCI SB RH
Work produced at EPFL
Journal Articles
Published
Record creation date
2010-11-08