Tunable band-stop filter based on single RF MEMS capacitive shunt switch with meander arm inductance

This paper presents a novel high-frequency filter concept based on a single MEMS capacitive shunt structure using meander arm inductance. Tuning ranges of the central frequency in the order of 55% are experimentally demonstrated for filters operating between 13.5 GHz to 30GHz and 17 GHz to 37 GHz. A low transmission loss of 0.44 dB and a rejection level of -20.5 dB at 17 GHz are reported. The outstanding tuning range is due to the simultaneous tunability of the MEMS capacitive switch (with a capacitance ratio > 1.5) and the exploitation of the voltage-controlled capacitance coupling between the meander arm inductance and the substrate. ©2009 IEEE.

Published in:
ESSDERC 2009 - Proceedings of the 39th European Solid-State Device Research Conference, null, null, 331-334
Presented at:
39th European Solid-State Device Research Conference (ESSDERC), Athens, Greece, September 15-19, 2009

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 Record created 2010-11-08, last modified 2018-01-28

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