Ultra-Sensitive Capacitive Detection Based on SGMOSFET Compatible With Front-End CMOS Process

Capacitive measurement of very small displacement of nano-electro-mechanical systems (NEMS) presents some issues that are discussed in this article. It is shown that performance is fairly improved when integrating on a same die the NEMS and CMOS electronics. As an initial step toward full integration, an in-plane suspended gate MOSFET (SGMOSFET) compatible with a front-end CMOS has been developed. The device model, its fabrication, and its experimental measurement are presented. Performance obtained with this device is experimentally compared to the one obtained with a stand-alone NEMS readout circuit, which is used as a reference detection system. The 130 nm CMOS ASIC uses a bridge measurement technique and a high sensitive first stage to minimize the influence of any parasitic capacitances.


Published in:
IEEE Journal of Solid-State Circuits, 44, 1, 247-257
Year:
2009
Publisher:
Institute of Electrical and Electronics Engineers
ISSN:
0018-9200
Keywords:
Laboratories:




 Record created 2010-11-08, last modified 2018-03-18


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)