Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA
2010
Details
Title
Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA
Author(s)
Gautsch, Sebastian ; de Rooij, Nico
Conference
36th International Conference on Micro & Nano Engineering (MNE 2010), Genova, Italy, September 19-22, 2010
Date
2010
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2010-11-08