Rigid design of fast scanning probe microscopes using finite element analysis
Kindt, J. H.; Fantner, G. E.; Cutroni, J. A.; Hansma, P. K.
2004

Abstract

To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider the mechanical rigidity of the actuator (scanner), and the overall mechanical structure. Using finite element analysis in the design process, it was possible to increase the first resonance frequency from 950 Hz for the whole system to 23.4 kHz for the whole system. This constitutes a factor of similar to25 in resonance frequency and a factor of 625 in stiffness and, hence, noise immunity. (C) 2004 Elsevier B.V. All rights reserved.

Details

Title Rigid design of fast scanning probe microscopes using finite element analysis
Author(s) Kindt, J. H. ; Fantner, G. E. ; Cutroni, J. A. ; Hansma, P. K.
Published in Ultramicroscopy
Volume 100
Issue 3-4
Pages 259-265
Date 2004
ISSN 0304-3991
Note 5th International Conference on Scanning Probe Microscopy
MAY 23-26, 2003
Heythrop Park, ENGLAND
DOI https://doi.org/10.1016/j.ultramic.2003.11.009
Other identifier(s) View record in Web of Science
Laboratories LBNI
Record Appears in Scientific production and competences > STI - School of Engineering > IBI-STI - Interfaculty Institute of Bioengineering > LBNI - Laboratory for Bio- and Nano-Instrumentation
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date 2010-11-05

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