Design and modeling of a high-speed scanner for atomic force microscopy
Schitter, G.; Astrom, K. J.; DeMartini, B.; Fantner, G. E.; Turner, K.; Thurner, P. J.; Hansma, P. K.
2006

Abstract

A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4.3 micrometers. The focus of this contribution is on the vertical positioning direction of the scanner, being the crucial axis of motion with the highest bandwidth and precision requirements for gentle imaging with the atomic force microscope. A mathematical model of the scanner dynamics is presented that will enable more accurate topography measurements with the high-speed AFM system.

Details

Title Design and modeling of a high-speed scanner for atomic force microscopy
Author(s) Schitter, G. ; Astrom, K. J. ; DeMartini, B. ; Fantner, G. E. ; Turner, K. ; Thurner, P. J. ; Hansma, P. K.
Published in 2006 American Control Conference
Pages 502-507
Conference American Control Conference 2006, Minneapolis, MN, JUN 14-16, 2006
Date 2006
ISSN 0743-1619
DOI https://doi.org/10.1109/ACC.2006.1655406
Other identifier(s) View record in Web of Science
Laboratories LBNI
Record Appears in Scientific production and competences > STI - School of Engineering > IBI-STI - Interfaculty Institute of Bioengineering > LBNI - Laboratory for Bio- and Nano-Instrumentation
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date 2010-11-05

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