000154169 001__ 154169
000154169 005__ 20181203022045.0
000154169 0247_ $$2doi$$a10.1115/1.4000378
000154169 022__ $$a0022-0434
000154169 02470 $$2ISI$$a000271646800011
000154169 037__ $$aARTICLE
000154169 245__ $$aDMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
000154169 269__ $$a2009
000154169 260__ $$c2009
000154169 336__ $$aJournal Articles
000154169 500__ $$aTimes Cited: 0
000154169 520__ $$aNew developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with integrated readout circuit and actuator built in on the cantilever. Such a fully instrumented cantilever allows a much more direct measurement and actuation of the cantilever motion and interaction with the sample. This technology is expected to not only allow for high speed imaging but also the miniaturization of AFMs. Based on the complexity of these integrated MEMS devices, a thorough understanding of their behavior and a specialized controls approach is needed to make the most use out of this new technology. In this paper we investigate the intrinsic properties of such MEMS cantilevers and develop a combined approach for sensing and control, optimized for high speed detection and actuation. Further developments based on the results presented in this paper will help to expand the use of atomic force microscopy to a broad range of everyday applications in industrial process control and clinical diagnostics.
000154169 700__ $$0244716$$g199129$$aFantner, G. E.
000154169 700__ $$aBurns, D. J.
000154169 700__ $$aBelcher, A. M.
000154169 700__ $$aRangelow, I. W.
000154169 700__ $$aYoucef-Toumi, K.
000154169 773__ $$j131$$tJournal of Dynamic Systems Measurement and Control-Transactions of the Asme$$k6
000154169 909C0 $$xU12183$$0252332$$pLBNI
000154169 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:154169
000154169 937__ $$aEPFL-ARTICLE-154169
000154169 937__ $$aEPFL-ARTICLE-154169
000154169 973__ $$rREVIEWED$$sPUBLISHED$$aOTHER
000154169 980__ $$aARTICLE