Off-Axis Low Coherence Interferometry for Surface Topology Measurement
2010
Abstract
In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.
Details
Title
Off-Axis Low Coherence Interferometry for Surface Topology Measurement
Author(s)
Delacrétaz, Yves ; Boss, Daniel ; Lang, Florian ; Depeursinge, Christian
Published in
Speckle 2010: Optical Metrology
Series
Proceedings of SPIE-The International Society for Optical Engineering, 7387
Pages
738715
Conference
Speckle 2010, Florianopolis, Brazil, September, 13-15, 2010
Date
2010
Publisher
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN
978-0-8194-7670-8
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2010-11-01