Highly sensitive Hall magnetic sensor microsystem in CMOS technology
A highly sensitive magnetic sensor microsystem based on a flail device is presented. This microsystem consists of a Hall device improved by an integrated magnetic concentrator and new circuit architecture for the signal processing. It provides an amplification of the sensor signal with a resolution better than 30 muV and a periodic offset cancellation while the output of the microsystem is available in continuous time. This microsystem features the overall magnetic gain of 420 V/T.