High-quality factor MEMS based oscillator: Silicon 9 MHz oscillator with low phase noise and high quality factor

In this paper, an oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) working at 9.4MHz is presented. The electrical characteristics of this active MEM resonator are detailed for static and dynamic operation. The benefit of the intrinsic gain for oscillator design is analyzed and an oscillator design is proposed based on these findings. The reported oscillator performance shows the advantages of an active MEM resonator for the construction of MEM based oscillators with respect to the reduced requirements on the electronics. © 2009 by Department of Microelectronics & Computer Science.

Published in:
Mixdes 2009: Proceedings Of The 16Th International Conference Mixed Design Of Integrated Circuits And Systems, 276-281
Presented at:
16th International Conference Mixed Design of Integrated Circuits and Systems, Lodz, POLAND, Jun 25-27, 2009
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
Electronic Laboratory, EPFL, 1015 Lausanne, Switzerland Nanoelectronic Devices Laboratory, EPFL, 1015 Lausanne, Switzerland, Export Date: 19 January 2010, Source: Scopus, Art. No.: 5289466, References: Nguyen, C.T.C., MEMS technology for timing and frequency control (2007) Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, 54, pp. 251-270; Nathanson, J.H.C., Wickstrom, R.A., A resonant-gate silicon surface transistor with high-Q band-pass properties (1965) Applied Physics Letters, 7, pp. 84-86; Abele, N., Fritschi, R., Boucart, K., Casset, F., Ancey, P., Ionescu, A.M., Suspended-gate MOSFET: Bringing new MEMS functionality into solid-state MOS transistor (2005) Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International, pp. 479-481; Grogg, D., Mazza, M., Tsamados, D., Ionescu, A.M., Multi-gate Vibrating-body Field Effect Transistors (VB-FETs) (2008) Electron Devices Meeting, 2008. IEDM 2008. IEEE International, pp. 663-666; Nguyen, C.T.C., Howe, R.T., Design and performance of CMOS micromechanical resonator oscillators (1994) Frequency Control Symposium, 1994, pp. 127-134. , 48th, Proceedings of the 1994 IEEE International; Nguyen, C.T.C., Howe, R.T., An integrated CMOS micromechanical resonator high-Q oscillator (1999) Solid-state Circuits, IEEE Journal of, 34, pp. 440-455; Yu-Wei, L., Seungbae, L., Sheng-Shian, L., Yuan, X., Zeying, R., Nguyen, C.T.C., Series-resonant VHF micromechanical resonator reference oscillators (2004) Solid-state Circuits, IEEE Journal of, 39, pp. 2477-2491; Seungbae, L., Nguyen, C.T.C., Influence of automatic level control on micromechanical resonator oscillator phase noise (2003) Frequency Control Symposium and pda Exhibition Jointly with the 17th European Frequency and Time Forum, 2003, pp. 341-349. , proceedings of the 2003 ieee international; Grogg, D., Lo Conte, F., Kayal, M., Ionescu, A.M., 9 MHz vibrating body FET tuning fork oscillator (2009) EFTF-IFCS, , to be presented, Besançon; Grogg, D., Meinen, C., Tsamados, D., Tekin, H.C., Kayal, M., Ionescu, A.M., Double gate movable body micro-electro-mechanical FET as hysteretic switch: Application to data transmission systems (2008) Solid-state Device Research Conference, 2008. ESSDERC 2008. 38th European, pp. 302-305; Blagojevic, M., Pastre, M., Kayal, M., Fazan, P., Okhonin, S., Nagoga, M., Declercq, M., SOI capacitor-less 1-transistor DRAM sensing scheme with automatic reference generation (2004) IEEE Symposium on VLSI Circuits, pp. 182-183. , June; Blagojevic, M., Kayal, M., Pastre, M., Harik, L., Okhonin, S., Fazan, P., Capacitor-less 1T DRAM sensing scheme with automatic reference generation (2006) IEEE Journal of Solid-state Circuits (JSSC), 41, pp. 1463-1470. , June; Pastre, M., Kayal, M., Blanchard, H., A hall sensor analog front end for current measurement with continuous gain calibration (2007) IEEE Sensors Journal, 7 (5), pp. 860-867. , Special Edition on Intelligent Sensors, May; Kaajakari, V., Mattila, T., Oja, A., Seppa, H.A.S.H., Nonlinear limits for single-crystal silicon microresonators (2004) Microelectromechanical Systems, Journal of, 13, pp. 715-724; Kaajakari, V., Koskinen, J.K., Mattila, T., Phase noise in capacitively coupled micromechanical oscillators (2005) Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, 52, pp. 2322-2331
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Scopus: 2-s2.0-72149129450

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