Integrating Bio-sensing Functions on CMOS Chips

The paper discusses the recent achievements in the development of chips with integrated sensing of biomolecules. In particular, it focuses on integrated sensing electrodes on silicon and presents innovative solutions for the enhanced robustness of the electrodes towards cleaning processes and electrolytes. In this study, a microfabrication technology for 3D-integrated disposable chip layers to enable the reusability of the overall system for many times is presented.


Publié dans:
Proceedings of Asia Pacific Conference on Circuits and Systems (APCCAS 2010)
Présenté à:
2010 Asia Pacific Conference on Circuits and Systems (APCCAS 2010), Kuala Lumpur, Malaysia, December 6 – 9
Année
2010
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN:
978-1-4244-7456-1
Mots-clefs:
Laboratoires:


Note: Le statut de ce fichier est: Seulement EPFL


 Notice créée le 2010-09-30, modifiée le 2019-03-16

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