Interferometric Measurement on a Nanometric Length Scale

We investigate a measurement technique based on High Resolution Interference Microscopy (HRIM). HRIM allows the characterization of amplitude and phase of electromagnetic wave-fields in the far-field with a spatial accuracy that corresponds to a few nanometers in the object plane. The experimental tool working in transmission with a resolution of 20 nm in the object plane was presented in our previous work [1]. The accurate measurement of the optical characteristics below the classical resolution limit will be discussed.


Presented at:
Atelier LEA-Microtechnique (Laboratorie Européenne Associé en microtechnique), Arc-et-Senans, France, September 8 - 9, 2008
Year:
2008
Keywords:
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 Record created 2010-09-27, last modified 2018-09-13

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