Conference paper

Interferometric Measurement on a Nanometric Length Scale

We investigate a measurement technique based on High Resolution Interference Microscopy (HRIM). HRIM allows the characterization of amplitude and phase of electromagnetic wave-fields in the far-field with a spatial accuracy that corresponds to a few nanometers in the object plane. The experimental tool working in transmission with a resolution of 20 nm in the object plane was presented in our previous work [1]. The accurate measurement of the optical characteristics below the classical resolution limit will be discussed.

    Keywords: Measurement ; HRIM


    • EPFL-CONF-152152

    Record created on 2010-09-27, modified on 2017-05-10

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