Multiwavelength High Resolution Interference Microscopy (HRIM) for the characterization of small size microlenes

1. Introduction Definitions of microlens and Challenges for small size 2. High Resolution Interference Microscope (HRIM) System and Upgraded features 5 frame phase shift algorithm 3. Principle of characterization of microlenses Standard tests Unconventional tests 4. Experiments Test results and discussions 5. Conclusion


Presented at:
Annual Conference of Association des Scientiques Coréens en France (ASCoF) , Rennes, France, May 14, 2010
Year:
2010
Keywords:
Laboratories:


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 Record created 2010-09-27, last modified 2018-03-17

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