Conference paper

Multiwavelength High Resolution Interference Microscopy (HRIM) for the characterization of small size microlenes

1. Introduction Definitions of microlens and Challenges for small size 2. High Resolution Interference Microscope (HRIM) System and Upgraded features 5 frame phase shift algorithm 3. Principle of characterization of microlenses Standard tests Unconventional tests 4. Experiments Test results and discussions 5. Conclusion


  • There is no available fulltext. Please contact the lab or the authors.

Related material