Files

Action Filename Description Size Access License Resource Version
Show more files...

Abstract

We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm.

Details

Actions

Preview