High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology

We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm.


Published in:
Journal of the European Optical Society, RP5, 10035s
Year:
2010
Publisher:
European Optical Society
ISSN:
1990-2573
Keywords:
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 Record created 2010-09-10, last modified 2018-09-13

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