RIE of Solenoidal Microcoil Glass Mould with Integrated Sample Container for Micro-MRI

Micro-MRI is an imaging technique used to obtain information on cellular biochemistry by spatial mapping of 1H NMR relaxation times. The sensitivity and MRI resolution of solenoidal receive coils is superior to spiral coil geometries. We developed a new MEMS-based fabrication method promising to overcome many of the disadvantages of previously developed Micro-MRI systems.


Presented at:
IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), 2007
Year:
2007
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2010-07-09, last modified 2018-03-17

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