Small-size microlens characterization by multiwavelength high-resolution interference microscopy

Microlenses are widely studied in two main areas: fabrication and characterization. Nowadays, characterization draws more attention because it is difficult to apply test techniques to microlenses that are used for conventional optical systems. Especially, small microlenses on a substrate are difficult to characterize because their back focus often stays in the substrate. Here we propose immersion high-resolution interference microscopy to characterize small-size microlenses at three visible wavelengths. Test results for 20-?m-diameter microlenses are presented and discussed. We cover not only standard characterizations like wavefront investigations but also experiments of actual focus properties and chromatic behaviors.


Published in:
Optics Express, 18, 14, 14319
Year:
2010
Publisher:
Optical Society of America
ISSN:
1094-4087
Keywords:
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 Record created 2010-07-06, last modified 2018-03-17

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