Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms


Year:
2010
Other identifiers:
EPO Family ID: 40380455
TTO: 6.0834
Laboratories:




 Record created 2010-06-30, last modified 2018-03-18


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