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Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress

Sasaki, M. ; Hane, K. ; Briand, D. ; Noell, W.[...]

Presented at:
International Display Workshop IWD'08 , Niigata, Japan, December 3-5, 2008
Year:
2008
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published



 Record created 2010-06-18, last modified 2018-03-17


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