Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
2008
Details
Title
Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
Author(s)
Sasaki, M. ; Hane, K. ; Briand, D. ; Noell, W. ; de Rooij, N.
Conference
International Display Workshop IWD'08 , Niigata, Japan, December 3-5, 2008
Date
2008
Laboratories
SAMLAB