Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
Sasaki, M.; Hane, K.; Briand, D.; Noell, W.; de Rooij, N.
2008

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Title Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
Author(s) Sasaki, M. ; Hane, K. ; Briand, D. ; Noell, W. ; de Rooij, N.
Conference International Display Workshop IWD'08 , Niigata, Japan, December 3-5, 2008
Date 2008
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
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