Solid on liquid deposition

A process for the deposition of a solid layer onto a liquid is presented. The polymer poly-di-chloro-paraxylylene, also known as Parylene C, was grown on low vapour pressure liquids using the conventional low pressure chemical vapour deposition process. A reactor was built and a process developed to enable the deposition of Parylene C at atmospheric pressure over high vapour pressure liquids. It was used to deposit Parylene C over water among others. In all cases Parylene C encapsulated the liquid without influencing its initial shape. The results presented here show also that the Parylene C properties are not affected by its growth on liquid templates and the roughness of the Parylene C surface in contact with the liquid during the deposition is extremely low. (c) 2010 Elsevier B.V. All rights reserved.


Published in:
Thin Solid Films, 518, 18, 5061-5065
Year:
2010
Publisher:
Elsevier
ISSN:
0040-6090
Keywords:
Laboratories:




 Record created 2010-06-15, last modified 2018-09-13


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