Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detection
In this paper, we introduce a charge integrator as a read-out system for piezoelectric cantilever sensors. The charge integrator is used to monitor the surface charge induced by piezoelectric materials as a function of mechanical stress. This technique improves the response of piezoelectric cantilever sensors in low-frequency measurements, which makes them suitable for chemical and biological detection. Furthermore, it is capable of real-time, portable and all-electrical detection. The detection of alkanethiols on the Au-coated piezoelectric cantilevers is demonstrated to verify the concept.
Keywords: piezoelectric cantilever ; charge integrator ; self-assembled monolayer ; alkanethiol ; Self-Assembled Monolayers ; Ferroelectric Thin-Films ; Microcantilever Sensors ; Coefficient ; Mems ; Fabrication ; Actuators ; Compact ; D(31) ; Array
Record created on 2010-06-02, modified on 2016-08-08