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conference paper not in proceedings
Time-resolved SiH4 density inside a chemical vapor deposition system: gas flow dynamics and glow discharge control
2010
Type
conference paper not in proceedings
Authors
•
•
Strahm, Benjamin
•
Feltrin, Andrea
•
•
Publication date
2010
Note
IMT-NE Number: 565
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
San Francisco, USA | Apr. 5–9 | |
Available on Infoscience
June 1, 2010
Use this identifier to reference this record