000148426 001__ 148426
000148426 005__ 20190316234802.0
000148426 0247_ $$2doi$$a10.1117/12.854297
000148426 02470 $$2ISI$$a000285297700043
000148426 037__ $$aCONF
000148426 245__ $$aDigital holographic microscopy for silicon microsystems metrology
000148426 269__ $$a2010
000148426 260__ $$bSPIE$$c2010
000148426 336__ $$aConference Papers
000148426 490__ $$aProceedings of SPIE-The International Society for Optical Engineering
000148426 520__ $$aWe propose to use digital holographic microscopy (DHM) with an illumination in the near infrared spectrum bandwidth, where the silicon is known to have small absorption. With such an illumination condition, it is possible to observe a wider range of specimens than in the visible spectrum, providing a new metrology technique for 3D silicon micro-systems characterization. Suitability of DHM with near infrared illumination for micro-optical elements and wafer inspection is demonstrated. The intrinsic robustness and speed of the method place DHM as a valuable candidate for real-time quality check inside production chains, opening a wide field of applications in quality control.
000148426 6531_ $$a[MVD]
000148426 700__ $$aDelacrétaz, Yves
000148426 700__ $$g104931$$aDepeursinge, Christian$$0240009
000148426 7112_ $$dApril 13-15, 2010$$cBruxelles, Belgium$$aPhotonics Europe 2010
000148426 773__ $$j7719$$tSilicon Photonics and Photonic Integrated Circuits II$$q77191M
000148426 8564_ $$uhttp://spiedigitallibrary.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PSISDG00771900000177191M000001&idtype=cvips&gifs=Yes&bproc=symp&scode=EPE10&ref=no$$zURL
000148426 909C0 $$xU10346$$0252008$$pLOA
000148426 909CO $$qGLOBAL_SET$$pconf$$ooai:infoscience.tind.io:148426$$pSTI
000148426 917Z8 $$x146896
000148426 917Z8 $$x146896
000148426 937__ $$aEPFL-CONF-148426
000148426 973__ $$rNON-REVIEWED$$sPUBLISHED$$aEPFL
000148426 980__ $$aCONF