Files
Details
Title
Diagnostics and Simulation for Large Area RF Plasma Deposition Reactors
Author(s)
Howling, Alan
Conference
Invitation to Nankai University, Tianjin, China, March 28 - April 3, 2010
Date
2010
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Presentations & Talks
Work outside EPFL
Published
Presentations & Talks
Work outside EPFL
Published
Record creation date
2010-04-09