Diagnostics and Simulation for Large Area RF Plasma Deposition Reactors


Presented at:
Invitation to Nankai University, Tianjin, China, March 28 - April 3, 2010
Year:
2010
Laboratories:
SPC
CRPP




 Record created 2010-04-09, last modified 2018-09-13

n/a:
CRPPLargeAreaDiagnostics - Download fulltextPDF
CRPPLargeAreaSimulation - Download fulltextPDF
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