Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition (Invited paper)
2009
Details
Title
Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition (Invited paper)
Author(s)
Howling, Alan
Conference
American Vacuum Society AVS 56th International Symposium and Exhibition, San Jose, California, USA, November 8-13, 2009
Date
2009
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Presentations & Talks
Work outside EPFL
Published
Presentations & Talks
Work outside EPFL
Published
Record creation date
2010-04-08