Home > Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition (Invited paper)
 

Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition (Invited paper)

Howling, Alan

Presented at:
American Vacuum Society AVS 56th International Symposium and Exhibition, San Jose, California, USA, November 8-13, 2009
Year:
2009
Laboratories:
SPC
CRPP

Record appears in:
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Presentations & Talks
Work outside EPFL
Published



 Record created 2010-04-08, last modified 2018-01-28


Rate this document:

Rate this document:
1
2
3
4
5
 
(Not yet reviewed)