Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition (Invited paper)

• Presented at: American Vacuum Society AVS 56th International Symposium and Exhibition, San Jose, California, USA, November 8-13, 2009
• Publication date: 2009

Reference

• EPFL-TALK-148200

Record created on 2010-04-08, modified on 2017-05-12