Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition (Invited paper)


Presented at:
American Vacuum Society AVS 56th International Symposium and Exhibition, San Jose, California, USA, November 8-13, 2009
Year:
2009
Laboratories:
SPC
CRPP




 Record created 2010-04-08, last modified 2018-01-28


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)