Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.

Published in:
Proceedings of the Conference Phd Research In Microelectronics And Electronics, 121-124
Presented at:
Conference on PhD Research in Microelectronics and Electronics, Istanbul, TURKEY, June 22-25, 2008
IEEE Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa

 Record created 2010-04-07, last modified 2018-03-17

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