Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics

Bridges buckled by film stress call generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.


Published in:
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING , 5, 131-136
Year:
2010
Publisher:
Wiley-Blackwell
ISSN:
1931-4973
Laboratories:




 Record created 2010-04-01, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)