Digital holographic microscopy for micro-systems investigation in near infrared

Delacrétaz, Yves; Bergoënd, Isabelle; Depeursinge, Christian

Delacrétaz, Yves; Bergoënd, Isabelle; Depeursinge, Christian

2009

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Abstract

We have demonstrated the suitability of digital holographic microscopy (DHM) with near infra-red illumination for micro-optical elements and silicon micro-systems characterization, opening a wide field of quality control applications.

Details

Title Digital holographic microscopy for micro-systems investigation in near infrared

Author(s) Delacrétaz, Yves ; Bergoënd, Isabelle ; Depeursinge, Christian

Conference 3rd EOS Topical Meeting on Optical Microsystems, Capri, Italy, September 27-30, 2009

Date 2009

Publisher EOS

ISBN 978-3-00-024191-8

Keywords

[MVD]

Laboratories LOA

Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published

Record creation date 2010-03-15