Digital holographic microscopy for micro-systems investigation in near infrared

We have demonstrated the suitability of digital holographic microscopy (DHM) with near infra-red illumination for micro-optical elements and silicon micro-systems characterization, opening a wide field of quality control applications.


Presented at:
3rd EOS Topical Meeting on Optical Microsystems, Capri, Italy, September 27-30, 2009
Year:
2009
Publisher:
EOS
ISBN:
978-3-00-024191-8
Keywords:
Laboratories:




 Record created 2010-03-15, last modified 2018-03-17


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