Conference paper

Digital holographic microscopy for micro-systems investigation in near infrared

We have demonstrated the suitability of digital holographic microscopy (DHM) with near infra-red illumination for micro-optical elements and silicon micro-systems characterization, opening a wide field of quality control applications.

    Keywords: [MVD]


    • EPFL-CONF-147242

    Record created on 2010-03-15, modified on 2017-05-10


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