Optimization of Ca Precursor Transport for High Vacuum Chemical Vapor Deposition (HV-CVD)
2009
Details
Title
Optimization of Ca Precursor Transport for High Vacuum Chemical Vapor Deposition (HV-CVD)
Author(s)
Luo, L. ; Kuzminykh, Yury ; Catalano, M.R. ; Malandrino, G. ; Hoffmann, Patrik
Published in
The 216th ECS Meeting, EuroCVD 17
Volume
17
Pages
173-179
Conference
The 216th ECS Meeting, EuroCVD 17, Vienna, Austria, October 4 - October 9, 2009
Date
2009
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LPMAT - Laboratory for Photonic Materials and Characterization
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2010-01-22