Optimization of Ca Precursor Transport for High Vacuum Chemical Vapor Deposition (HV-CVD)


Published in:
The 216th ECS Meeting, EuroCVD 17, 17, 173-179
Presented at:
The 216th ECS Meeting, EuroCVD 17, Vienna, Austria, October 4 - October 9, 2009
Year:
2009
Laboratories:




 Record created 2010-01-22, last modified 2018-09-13


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